Substrate case cleaning apparatus

ABSTRACT

Contaminant which sticks to an outer pod which is exposed to the outside air is prevented from contaminating an inner pod and the two can be cleaned so the cleaning precision can be improved. A substrate case C which is provided with an inner pod N which holds a substrate at the inside and an outer pod M which holds the inner pod N at the inside is cleaned in a state with no substrate. A booth  10  which forms a clean space is provided. Inside the booth  1 , a first cleaning tank  40  which cleans the parts of the outer base Mb and outer shell Ms of the outer pod M in a separated state and a second cleaning tank  50  which holds and cleans the parts of the inner base Nb and inner shell Ns of the inner pod N in a separated state are provided. A conveyance mechanism is provided with conveys these parts to the corresponding first cleaning tank  40  and second cleaning tank  50.

TECHNICAL FIELD

The present invention relates to a substrate case cleaning apparatuswhich cleans a substrate case which is used when storing or transportinga substrate which is used when transferring a circuit pattern of anelectronic device such as a mask substrate or wafer or othersemiconductor substrate or other substrate.

BACKGROUND ART

In the past, as this type of substrate case cleaning apparatus, forexample, the one which is described in PLT 1 (Japanese PatentPublication No. 2005-109523A) was known. As shown in FIG. 22, thissubstrate case cleaning apparatus Sa cleans a substrate case C, whichcomprises a base Cb and a shell Cs which covers this base Cb and whichholds a substrate (not shown) at its inside, in the state with nosubstrate. The substrate case cleaning apparatus Sa is provided with abooth 200 which forms a clean space. Inside this booth 200, a cleaningtank 201 is provided which holds and cleans the parts of the base Cb andshell Cs in a separated state. The cleaning tank 201 is provided with atank body 202 which has an opening which opens to above and a lid 203which opens and closes the opening of the tank body 202. At the outsideof the booth 200, a setting table 204 which carries the substrate case Cis provided. An arm robot 205 grips the substrate case C which iscarried on the setting table 204 by a gripping hand 207 and conveys itto a support table 206 which is provided at the inside of the booth 200.Further, the arm robot 205 grips the shell Cs of the substrate case Cwhich is supported at the support table 206 by the gripping hand 207 andconveys it to the inside of the tank body 202 of the cleaning tank 201and conveys the base Cb of the substrate case C to the lid 203 of thecleaning rank 201 to set it there. After that, the lid 203 is closed. Inthat state, the shell Cs and base Cb are cleaned inside of the tank body202. When the cleaning ends, the lid 203 of the cleaning tank 201 isopened, and the arm robot 205 successively conveys the base Cb and shellCs of the substrate case C on the support table 206 where they areassembled into the substrate case C. Further, again, the arm robot 205conveys the substrate case C from the support table 206 to the settingtable 204 outside of the booth 200.

CITATION LIST Patent Literature

PLT 1: Japanese Patent Publication No. 2005-109523A

SUMMARY OF INVENTION Technical Problem

In this regard, for example, in photolithography drawing integratedcircuit patterns on a silicon wafer, along with the higher integrationof LSIs, an EUV (Extreme Ultra Violet) mask has been used as thesubstrate on which EUV light is irradiated in a vacuum. A substrate casewhich holds and stores this EUV mask, as shown in FIG. 20A and FIG. 20B,is a double-layer structure. This double-layer structure substrate caseC is provided with an inner pod N and an outer pod M. The inner pod N iscomprised of an inner base Nb and an inner shell Ns which covers thisinner base Nb and holds a mask as a substrate D inside it. The outer podM is comprised of an outer base Mb which supports the inner base Nb ofthe inner pod N and an outer shell Ms which covers the outer base Mb. Atthe inside, the inner pod N is stored. The substrate case C is made adouble-layer structure in this way so as to thoroughly protect thesubstrate D from being contaminated from the outside air. The outer podM is exposed to the outside air, but the inner pod N is neverintentionally exposed to the outside air so long as the outer pod M isnot opened.

When cleaning such a substrate case C, it may be considered to use sucha conventional substrate case cleaning apparatus Sa for cleaning.However, in a conventional cleaning apparatus Sa, it is structurallydifficult to use a single cleaning tank 201 to hold and clean an outerpod M and an inner pod N. Even if the outer pod M and the inner pod Ncan be held and cleaned in the cleaning tank 201, there is the problemthat the contaminant which sticks to the outer pod M which is furtherexposed to the outside air may cause secondary contamination of theinner pod N. The inner pod N directly stores the substrate D, so furthercleanliness is required.

The present invention was made in consideration of this situation, soprovides a substrate case cleaning apparatus which prevents contaminantwhich sticks to the outer pod which is exposed to the outside air fromcontaminating the inner pod and which can clean the two and therebyimproves the cleaning precision.

Solution to Problem

The substrate case cleaning apparatus according to the present inventionis a substrate case cleaning apparatus which cleans, in a state with nosubstrate, a substrate case which is provided with an inner pod which iscomprised of an inner base and an inner shell which covers the innerbase and holds a substrate inside it and with an outer pod which iscomprised of an outer base which supports the inner base of the innerpod and an outer shell which covers the outer base and holds the innerpod inside it, the substrate case cleaning apparatus comprising: a boothwhich forms a clean space, a first cleaning tank which is providedinside the booth and holds and cleans parts of the outer base and outershell of the outer pod in a separated state, a second cleaning tankwhich is provided inside the booth and holds and cleans parts of theinner base and inner shell of the inner pod in a separated state, and aconveyance mechanism which conveys the parts of the outer pod and theinner pod to the corresponding first cleaning tank and second cleaningtank.

Due to this, when cleaning the substrate case, the conveyance mechanismconveys the parts of the outer base and outer shell of the outer pod tothe first cleaning tank and conveys the parts of the inner base andinner shell of the inner pod to the second cleaning tank. Further, inthe first cleaning tank and the second cleaning tank, the parts of theouter pod and the inner pod are cleaned. In this case, the outer pod andthe inner pod are individually cleaned by separate cleaning tanks, so itis possible to prevent contaminant which sticks to the outer pod whichis exposed to the outside air from causing secondary contamination atthe inner pod and possible to improve the cleaning precision. Further,when the cleaning is ended, the conveyance mechanism is used to take outand convey the parts of the outer base and the outer shell of the outerpod from the first cleaning tank and is used to take out and convey theparts of the inner base and the inner shell of the inner pod from thesecond cleaning tank.

Further, the substrate case cleaning apparatus according to the presentinvention can be configured so as to further comprise a support tablewhich is provided inside of the booth and supports the substrate casewith the outer base or the outer shell facing down in a state assembledto be able to be separated in the vertical direction, wherein,

-   -   when the support table supports the substrate case with the        outer base facing down, the conveyance mechanism conveys the        outer shell, inner shell, inner base, and outer base in that        order from the support table to the insides of the corresponding        first cleaning tank and second cleaning tank before cleaning the        substrate case and conveys the outer base, inner base, inner        shell, and outer shell in that order from the insides of the        corresponding first cleaning tank and second cleaning tank to        the support table for assembly after cleaning the substrate        case, and when the support table supports the substrate case        with the outer shell facing down, the conveyance mechanism        conveys the outer base, inner base, inner shell, and outer shell        in that order from the support table to the insides of the        corresponding first cleaning tank and second cleaning tank        before cleaning the substrate case and conveys the outer shell,        inner shell, inner base, and outer base in that order from the        insides of the corresponding first cleaning tank and second        cleaning tank to the support table for assembly after cleaning        the substrate case. Due to this, the conveyance mechanism can be        used to convey the parts of the outer pod and the inner pod to        the successively corresponding first cleaning tank and second        cleaning tank before cleaning and can be used to take cut and        convey the parts of the outer pod and the inner pod from the        successively corresponding first cleaning tank and second        cleaning tank, so the parts of the outer pod and the inner pod        can be reliably disassembled and assembled after cleaning.

Further, the substrate case cleaning apparatus according to the presentinvention can be configured so that each of the first cleaning tank andthe second cleaning tank has a tank body which has an opening whichopens upward and a lid which can open and close so as to open theopening of the tank body when parts of the outer pod or inner pod of thesubstrate case are conveyed and close it when cleaning the parts,wherein the support table, the first cleaning tank, and the secondcleaning tank are arranged along one horizontal direction in series, andwherein the conveyance mechanism has a holding mechanism which canrespectively hold the outer base and outer shell of the outer pod andthe inner base and inner shell of the inner pod, an elevation mechanismwhich makes the holding mechanism move up and down in the verticaldirection, a running movement mechanism which makes the holdingmechanism move to run in one horizontal direction, and a control partwhich controls drive operations of the holding mechanism, the elevationmechanism, and the running movement mechanism. Due to this, theconveyance mechanism can convey the parts by just making the holdingmechanism move in the two axial directions of the vertical direction(Z-axis direction) and one horizontal direction (Y-axis direction) underthe control of the control part, so it is possible to simplify thestructure compared with a conventional arm robot and possible tofacilitate the disassembly and conveyance of parts. Further, broad spaceneed not be secured and space can be saved.

Furthermore, the substrate case cleaning apparatus according to thepresent invention can be configured so that the holding mechanism has agripping hand having a pair of hand units which can approach and moveapart from each other in another horizontal direction perpendicular tothe one horizontal direction and a drive part which makes the pair ofhand units of the gripping hand approach and move apart, and wherein thecontrol part controls the pair of hand units of the gripping hand toindividually hold the outer base and outer shell of the outer pod andthe inner base and inner shell of the inner pod. Due to this, under thecontrol of the control part, it is possible to make the holdingmechanism move in the two axial directions of the one horizontaldirection (Y-axis direction) and the vertical direction (Z-axisdirection) for positioning and make the gripping hand move in the otherhorizontal direction (X-axis direction) to grip the parts. Further, itis possible to use the pair of hand units to grip ail parts. Therefore,the structure can be made simpler.

In this case, in accordance with need, the pair of hand units of thegripping hand are provided with lock parts which lock respectivegripping parts of the outer base and outer shell of the outer pod andthe inner base and inner shell of the inner pod corresponding to theirshapes. Due to this, the parts are locked by the lock parts, so the gripbecomes more reliable.

Advantageous Effects of Invention

According to the substrate case cleaning apparatus of the presentinvention, the outer pod and the inner pod of the substrate case areindividually cleaned by separate cleaning tanks, so it is possible toprevent contaminant which sticks to the outer pod which is exposed tothe outside air from causing secondary contamination at the inner podand therefore possible to improve the cleaning precision.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a side cross-sectional view which shows a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 2 is a plan cross-sectional view which shows a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 3 is a horizontal cross-sectional view which shows a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 4 is a front view which shows a substrate case cleaning apparatusaccording to an embodiment of the present invention.

FIG. 5 is a perspective view which shows a setting table of a substratecase cleaning apparatus according to an embodiment of the presentinvention.

FIG. 6A is a perspective view which shows a support table of a substratecase cleaning apparatus according to an embodiment of the presentinvention.

FIG. 6B is a view which shows the state of supporting a substrate caseof a support table in a substrate case cleaning apparatus according toan embodiment of the present invention.

FIG. 7 is a view which shows a support table and holding mechanism of asubstrate case cleaning apparatus according to an embodiment of thepresent invention together with their actions.

FIG. 8A is a process chart which shows a movement mechanism of asubstrate case cleaning apparatus according to an embodiment of thepresent invention together with its operation (part 1).

FIG. 8B is a process chart which shows a movement mechanism of asubstrate case cleaning apparatus according to an embodiment of thepresent invention together with its operation (part 2).

FIG. 8C is a process chart which shows a movement mechanism of asubstrate case cleaning apparatus according to an embodiment of thepresent invention together with its operation (part 3).

FIG. 8D is a process chart which shows a movement mechanism of asubstrate case cleaning apparatus according to an embodiment of thepresent invention together with its operation (part 4).

FIG. 8E is a process chart which shows a movement mechanism of asubstrate case cleaning apparatus according to an embodiment of thepresent invention together with its operation (part 5).

FIG. 9 is a perspective view which shows an internal configuration of afirst cleaning tank (a second cleaning tank) of a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 10A is a plan view which shows the state of supporting an outershell of a first cleaning tank in a substrate case cleaning apparatusaccording to an embodiment of the present invention.

FIG. 10B is a side cross-sectional view which shows the state ofsupporting an outer shell of a first cleaning tank in a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 11A is a plan view which shoves the state of supporting an outerbase of a first cleaning tank in a substrate case cleaning apparatusaccording to an embodiment of the present invention.

FIG. 11B is a side cross-sectional view which shows the state ofsupporting an outer base of a first cleaning tank in a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 12A is a plan view which shows the state of supporting an innershell of a second cleaning tank in a substrate case cleaning apparatusaccording to an embodiment of the present invention.

FIG. 12B is a side cross-sectional view which shows the state ofsupporting an inner shell of a second cleaning tank in a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 13A is a plan view which shows the state of supporting an innerbase of a second cleaning tank in a substrate case cleaning apparatusaccording to an embodiment of the present invention.

FIG. 13B is a side cross-sectional view which shows the state ofsupporting an inner base of a second cleaning tank in a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 14A is a plan view which shows the state of supporting an inner podat a second cleaning tank in a substrate case cleaning apparatusaccording to an embodiment of the present invention.

FIG. 14B is a side cross-sectional view which shows the state ofsupporting an inner pod at a second cleaning tank in a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 15A is a plan view which shows the state of supporting an outer podat a first cleaning tank in a substrate case cleaning apparatusaccording to an embodiment of the present invention.

FIG. 15B is a side cross-sectional view which shows the state ofsupporting an outer pod at a first cleaning tank in a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 16A is a perspective view which shows a holding mechanism andelevation mechanism in a conveyance mechanism in a substrate casecleaning apparatus according to an embodiment of the present invention.

FIG. 16B is a principal perspective view which show main parts of agripping hand of a holding mechanism in a conveyance mechanism in asubstrate case cleaning apparatus according to an embodiment of thepresent invention.

FIG. 17A is a view which shows the state of holding an outer shell of aholding mechanism in a substrate case cleaning apparatus according to anembodiment of the present invention.

FIG. 17B is a view which shows the state of holding an outer base of aholding mechanism in a substrate case cleaning apparatus according to anembodiment of the present invention.

FIG. 15A is a view which shows the state of holding an inner shell of aholding mechanism in a substrate case cleaning apparatus according to anembodiment of the present invention.

FIG. 18B is a view which shows the state of holding an inner base of aholding mechanism in a substrate case cleaning apparatus according to anembodiment of the present invention.

FIG. 19 is a perspective view which shows the configuration of a holdingpart in a substrate case cleaning apparatus according to an embodimentof the present invention.

FIG. 20A is an overall perspective view which shows a substrate casehandled by a substrate case cleaning apparatus according to anembodiment of the present invention.

FIG. 20B is a disassembled perspective view which shows a substrate casehandled by a substrate case cleaning apparatus according to anembodiment of the present invention.

FIG. 21 is a view which shows an outside surface of an outer basehandled by a substrate case cleaning apparatus according to anembodiment of the present invention.

FIG. 22 is a view which shows an example of a conventional substratecase cleaning apparatus.

DETAILED DESCRIPTION OF EMBODIMENT

Below, based on the attached drawings, a substrate case cleaningapparatus according to an embodiment of the present invention will beexplained in detail. A substrate case cleaning apparatus S according toan embodiment of the present invention which is shown in FIG. 1 to FIG.19 is one which handles a substrate case C which holds theabove-mentioned EUV mask. As shown in FIG. 20A and FIG. 20B, thesubstrate case C is formed to a substantially rectangular box shape andhas an inner pod N which is comprised of an inner base Nb and an innershell Ns which covers this inner base Nb and holds a mask as a substrateD inside it and an outer pod M which is comprised of an outer base Mbwhich supports the inner base Nb of the inner pod N and an outer shellMs which covers the outer base Mb and holds the inner pod N inside it.The substrate case cleaning apparatus S cleans the substrate case C in astate with no substrate D.

As shown in FIG. 21, at the center of the outer base Mb of the outer podM, a latch type lock part 1 is provided which can lock the parts of theouter base Mb and outer shell Ms of the outer pod M and the inner baseNb and inner shell Ms of the inner pod N to be unable to separate fromeach other and which can unlock them to enable separation. The lock part1 has an insertion hole 2 which is formed at the outside surface of theouter base Mb and is provided with a mechanism (not shown) at the insideof this insertion hole 2. A latch pin 21 a of a latch drive part 21which is provided at a later explained support table 20 is inserted fromthis insertion hole 2. The latch drive part 21 can be turned to lock orunlock the lock part 1. Further, positioning recesses 3 in whichpositioning pins 15 which are provided at a later explained settingtable 13 are inserted are provided in an equiangular relationship atthree locations. Furthermore, engagement recesses 4 where engagementprojections 23 of the later explained support table 20 and engagementprojections 91 for positioning use which are provided at a back surfaceof a lid 43 of the first cleaning apparatus 40 are provided in anequiangular relationship at three locations adjoining the outsides ofthe positioning recesses 3.

The substrate case cleaning apparatus S according to an embodiment ofthe present invention, as shown in FIG. 1 to FIG. 4, is provided with abooth 10 which forms a clean space. The booth 10 is provided with anopening 11 through which a substrate case C can pass and which is openedand closed by a shutter 12. The shutter 12 is made to open and close byan actuator 12 a. At the outside of the opening 11 of the booth 10, asetting table 13 on which the substrate case C can be positioned and setat a predetermined orientation at a predetermined position is provided.The setting table 13 supports the substrate case C with the outer baseMb facing down. As shown in FIG. 5, it is formed into a fork shape whichhas an opening part 14 which opens toward the booth 10 side and exposesthe engagement recesses 4 of the outer base Mb of the substrate case C.At the top surface of the setting table 13, three positioning pins 15which are inserted into three positioning recesses 3 which are providedat the back surface of the outer base Mb are provided for positioning.Further, on the top surface of the setting table 13, four positioningblocks 16 for positioning use which hold the corner parts of the outerbase Mb are provided.

Further, the substrate case cleaning apparatus S, as shown in FIG. 1,FIG. 2, and FIG. 6A to FIG. 8E, is provided with a support table 20which supports a substrate case C inside the booth 10 with the outerbase Mb facing down in a state assembled to be able to be separated inthe vertical direction. The support table 20 is provided at a movementmechanism 30. Specifically, as shown in FIG. 6A, at the center of thesupport table 20, a latch drive part 21 is provided which is insertedfrom the insertion hole 2 of the outer base Mb of the supportedsubstrate case C and can lock and unlock the lock part 1. The latchdrive part 21 is comprised of a rotatable disk which is provided with aplurality of latch pins 21 a. An actuator 22 is provided which canrotate the disk of the latch drive part 21. Furthermore, at the outerperiphery of the support table 20, three engagement projections 23 areprovided which engage with the three engagement recesses 4 of the outerbase Mb of the supported substrate case C. Furthermore, the supporttable 20 is provided with four air suction type suction disks 24 whichhold by suction the outer base Mb of the supported substrate case C.

Further, as shown in FIG. 1, FIG. 2, and FIG. 7 to FIG. 8E, the movementmechanism 30 which the support table 20 is provided with opens theshutter 12 and moves the substrate case C which is placed on the settingtable 13 to the support table 20 before cleaning the substrate case Cand opens the shutter 12 and moves the substrate case C which issupported at the support table 20 to the setting table 13 after cleaningthe substrate case C. This movement mechanism 30 is provided with astand 31 which carries the support table 20. The stand 31 can movebetween two positions of an advance position R1 where it advances to thesetting table 13 side to receive and deliver a substrate case C betweenthe setting table 13 and the support table 20 and a retraction positionR2 where it retracts inside the booth 10 to deliver and receive asubstrate case C with the later explained conveyance mechanism. Further,the stand 31 can also be positioned at an initial position R3 furtherretracted from the retraction position R2. The movement mechanism 30 isprovided with a rail 32 which supports this moving stand 31 to be ableto move and an advance/retraction drive part 33 which is provided withfor example a ball screw mechanism which makes the stand 31 move to thetwo positions of the advance position R1 and retraction position R2 andto the initial position R3.

The support table 20, as shown in FIG. 8B and FIG. 8C, is provided to beable to move up and down with respect to the stand 31 of the movementmechanism 30. The stand 31 is provided with an up-down drive part 34which is comprised of an air cylinder apparatus which makes the supporttable 20 move up and down. The movement mechanism 30 makes the supporttable 20 rise at the advance position R1 to thereby make the engagementprojections 23 of the support table 20 engage with the engagementrecesses 4 of the substrate case C and hold the substrate case C bysuction by the suction disks 24 and lift up the substrate case C.Further, the movement mechanism 30 can move the support table 20 throughthe opening 14 of the setting table 13 while lifting up the substratecase C. Further, the latch drive part 21 which is provided at thesupport table 20 locks and unlocks the lock part 1 when making thesupport table 20 rise at the advance position R1 of the stand 31 to makethe engagement projections 23 of the support table 20 engage with theengagement recesses 4 of the substrate case C.

Furthermore, as shown in FIG. 1 to FIG. 3 and FIG. 9 to FIG. 15B, insidethe booth 10, a first cleaning tank 40 which holds and cleans the partsof the outer base Mb and outer shell Ms of the outer pod M in theseparated state and a second cleaning tank 50 which holds and cleans theparts of the inner base Nb and inner shell Ns of the inner pod N in theseparated state are provided. The support table 20, the first cleaningtank 40, and the second cleaning tank 50 are arranged in series alongone horizontal direction (Y-axis direction). Further, inside the booth10, a conveyance mechanism 6 which conveys the parts of the outer pod Mand the inner pod N of the substrate case C between the support table 20and the corresponding first cleaning tank 40 and second cleaning tank 50is provided.

In more detail, the first cleaning tank 40 is provided with a tank body42 which has an opening 41 which opens upward and a lid 43 which canopen and close to open the opening 41 of the tank body 42 when conveyingthe parts of the outer pod M of the substrate case C and close it whencleaning the parts. Further, as shown in FIG. 9, the first cleaning tank40 is provided with a first rotating plate 44 which is provided at thebottom part of the tank body 42 to be able to rotate about the verticaldirection axis, a first rotation drive part 45 which drives rotation ofthe first rotating plate 44, a plurality of (four) outer base supportrods 46 which are provided standing up at the first rotating plate 44and support parts of the outer edge of the outer base Mb (in theembodiment, the four corner parts) at a predetermined height position,and a plurality of (four) outer shell support rods 47 which are providedstanding up at the first rotating plate 44 and support parts of theouter edge of the outer shell Ms (in the embodiment, the four cornerparts) at a predetermined height position different from the outer basesupport rods 46.

The outer base support rods 46 are set higher than the outer shellsupport rods 47 and support the outer base Mb at a position higher thanthe outer shell Ms. As shown in FIG. 9, the front end parts of the outerbase support rods 46 and the outer shell support rods 47 are providedwith support members 48 which support the corner parts of the parts andwith guide pins 49 which are provided at the lefts and rights of thesupport members 48 and guide the two sides of the corners of the parts.Further, the plurality of outer base support rods 46 and the pluralityof outer shell support rods 47 of the first cleaning tank 40 areprovided standing up at mutually different positions in the rotationaldirection. In the embodiment, as shown in FIG. 9 to FIG. 15B, theplurality of outer base support rods 46 and the plurality of outer shellsupport rods 47 are provided standing up offset in phase 45° in therotation direction.

On the other hand, the second cleaning tank 50 is provided with a tankbody 52 which has an opening 51 which opens upward and a lid 53 whichcan open and close to open the opening 51 of the tank body 52 whenconveying the parts of the inner pod N of the substrate case C and closeit when cleaning the parts. In FIG. 9, while the inside of the firstcleaning tank 40 is shown, in the second cleaning tank 50 as well, theconfiguration is common with the first cleaning tank 40. For thecorresponding parts, the reference numerals of the second cleaning tank50 are provided in parentheses. As shown in FIG. 3, the second cleaningtank 50 is provided with a second rotating plate 54 which is provided atthe bottom part of the tank body 52 to be able to rotate about thevertical direction axis, a second rotation drive part 55 which drivesrotation of the second rotating plate 54, a plurality of (four) innerbase support rods 56 which are provided standing up at the secondrotating plate 54 and support parts of the outer edge of the inner baseNb (in the embodiment, the four corner parts) at a predetermined heightposition, and a plurality of (four) inner shell support rods 57 whichare provided standing up at the second rotating plate 54 and supportparts of the outer edge of the inner shell Ns (in the embodiment, thefour corner parts) at a predetermined height position different from theinner base support rods 56.

The inner base support rods 56 are set higher than the inner shellsupport rods 57 and support the inner base Nb at a higher position thanthe inner shell Ns. As shown in FIG. 9, the front end parts of the innerbase support rods 56 and inner shell support rods 57 are provided withsupport members 58 which support the corner parts of the parts and withguide pins 59 which are provided at the lefts and rights of the supportmembers 58 and guide the two sides of the corners of the parts. Further,the plurality of inner base support rods 56 and the plurality of innershell support rods 57 of the second cleaning tank 50 are providedstanding up at mutually different positions in the rotational direction.In the embodiment, as shown in FIG. 9 to FIG. 15B, the plurality ofinner base support rods 56 and the plurality of inner shell support rods57 are provided standing up offset in phase 45° in the rotationdirection. Further, inside the first cleaning tank 40 and the secondcleaning tank 50, a group of cleaning solution nozzles which eject aknown cleaning solution and an air nozzle which ejects dry air fordrying are provided.

Further, the present apparatus, as shown in FIG. 4, is provided with alater explained control part 100. The control part 100 is provided withthe function of controlling the first rotation drive part 45 and settingthe stop position of the outer base support rods 46 when supporting andreleasing support of the outer base Mb and the stop position of theouter shell support rods 47 when supporting and releasing support of theouter shell Ms offset in phase. In the embodiment, as shown in FIG. 10Aand FIG. 11A, the rods are offset in phase 45° in the rotationaldirection. This control part 100, in the same way, is provided with thefunction of controlling the second rotation drive part 55 and settingthe stop position of the support rods of the inner base Nb whensupporting and releasing support of the inner base Nb and the stopposition of the inner shell support rods 57 when supporting andreleasing support of the inner shell Ns offset in phase. In theembodiment, as shown in FIG. 12A and FIG. 13A, the rods are offset inphase 45° in the rotational direction.

Further, the support table 20 supports the substrate case C with theouter base Mb facing down at the support table 20, so the conveyancemechanism 60 conveys the outer shell Ms, inner shell Ns, inner base Nb,and outer base Mb in that order from the support table 20 to the insidesof the respectively corresponding first cleaning tank 40 and secondcleaning tank 50 before cleaning the substrate case C. Further, theconveyance mechanism 60 conveys the outer base Mb, inner base Nb, innershell Ns, and outer shell Ms in that order from the insides of thecorresponding first cleaning tank 40 and second cleaning tank 50 to thesupport table 20 after cleaning the substrate case C.

In more detail, the conveyance mechanism 60, as shown in FIG. 2, FIG. 3,FIG. 7, and FIG. 10A to FIG. 18B, is provided with a holding mechanism61 which can respectively grip the outer base Mb and outer shell Ms ofthe outer pod M and the inner base Nb and inner shell Ns of the innerpod N, an elevation mechanism 62 which can make the holding mechanism 61ascend and descend, in the vertical direction (Z-axis direction), and arunning movement mechanism 63 which makes the holding mechanism 61 moverunning in one horizontal direction (Y-axis direction). The control part100 controls the drive operation of the holding mechanism 61, theelevation mechanism 62, and the running movement mechanism 63. Due tothis, the support sable 20, the first cleaning tank 40, and the secondcleaning tank 50 are provided in series along one horizontal direction(Y-axis direction). The conveyance mechanism 60 can convey parts by justmaking the holding mechanism 61 move in the two axial directions of thevertical direction (Z-axis direction) and one horizontal direction(Y-axis direction) under the control of the control part 100. For thisreason, the conveyance mechanism 60 can be made simpler in structurecompared with a conventional arm robot and can easily separate andconvey parts. Further, it need not take up as much space and enablesspace-saving.

As shown in FIG. 16A and FIG. 16B, the holding mechanism 61 is providedwith a base plate 64. The elevation mechanism 62 is provided with anelevator rail 65 which supports the base plate 64 to be able to ascendand descend. A not shown drive part makes the base plate 64 ascend anddescend to position it at a required position in the vertical direction(Z-axis direction). Further, the running movement mechanism 63 isprovided with a horizontal rail 67 which supports the elevator rail 65to be able to move in one horizontal direction (Y-axis direction) and isfastened to the stand 66. The running 63 uses a not shown drive part tomake the elevator rail 65 move and position it at a required position inthe one horizontal direction (Y-axis direction).

The holding mechanism 61, as shown in FIG. 3, FIG. 7, and FIG. 16A toFIG. 18B, is provided with a gripping hand 70 which is provided with apair of hand units 71, 71 which can approach and move away from eachother in the other horizontal direction (X-axis direction) perpendicularto the one horizontal direction (Y-axis direction) and a drive part 72which makes the pair of hand units 71, 71 of the gripping hand 70approach and move away from each other. The drive part 72, for example,is comprised of an air cylinder apparatus and is mounted on the baseplate 64. The control part 100 controls the pair of hand units 71, 71 ofthe gripping hand 70 to make them individually grip the outer base Mband outer shell Ms of the outer pod M and the inner base Nb and innershell Ns of the inner pod N. The holding mechanism 61 grips the partsunder the control of the control part 100 which makes the holdingmechanism 61 move in the two axial directions of the one horizontaldirection (Y-axis direction) and the vertical direction (Z-axisdirection) for positioning and enables the gripping hand 70 to be movedin the other horizontal direction (X-axis direction). Further, the pairof gripping units 71, 71 are used to grip all of the parts, so thestructure can be simplified. As shown in FIG. 16B, FIG. 17A, FIG. 17B,FIG. 18A, and FIG. 18B, the pair of hand units 71, 71 of the grippinghand 70 are formed with lock parts 73, 74, 75, and 76 which lock withcorresponding shapes of grip parts of the outer base Mb and outer shellMs of the outer pod M and the inner base Nb and inner shell Ns of theinner pod N.

Further, in the substrate case cleaning apparatus S, the control part100 controls the gripping hand 70 to stand by at the standby position Q(see FIG. 2). In the embodiment, the standby position Q is set at theside end part of the shutter 12 of the booth 10. Further, as shown inFIG. 1, FIG. 2, and FIG. 16A and FIG. 16B, a cleaning means 80 forcleaning the gripping hand 70 is provided. This cleaning means 80 isprovided with a spray nozzle 81 which sprays gas to the gripping hand 70near the standby position Q and an exhaust fan 82 which exhausts gaswhich was ejected from the spray nozzle 81 from the inside of the booth10. As the gas, for example, air, nitrogen gas, etc. may be used.

Furthermore, in the substrate case cleaning apparatus S, as shown inFIG. 1 and FIG. 19, in the first cleaning tank 40, a holding part 90 isprovided which can cover and hold the outside surface of a part whichdoes not require cleaning when a part of at least one of the outer baseMb and outer shell Ms of the outer pod M (in the embodiment, the outerbase Mb) does not have to be cleaned at the outside surface. The holdingpart 90 is provided at the back surface of the lid 43 of the firstcleaning tank 40 and covers the outside surface of the outer base Mb, asthe part not requiring cleaning, by the back surface of the lid 43. Theholding part 90 is provided with three engagement projections 91 whichengage with three engagement recesses 4 of the outer base MB which isheld at the back surface of the lid 43. Further, the holding part 90 isprovided with four suction disks 92 which hold the outside surface ofthe outer base Mb by suction at the back surface of the lid 43. Sincethe back surface of the lid 43 is utilized, the structure of the holdingpart 90 can be made simpler.

Further, the control part 100 is provided with the function of judgingwhether the outside surface of the outer base Mb of the outer pod M doesnot have to be cleaned and, when judging it does not have to be cleaned,conveying the outer base Mb by the conveyance mechanism 60 to theholding part 90. The control part 100 judges whether cleaning isunnecessary by programming which is performed in advance before cleaningthe substrate case C relating to the cleaning or by detection of themodel type or shape etc. of the substrate case C by a sensor. In theembodiment, it is performed by programming which is performed in advancebefore cleaning the substrate case C. Further, the control part 100performs various control such as control of opening/closing operation ofthe above-mentioned shutter 12, control of the drive operation of themovement mechanism 30, control of the drive operation of the conveyancemechanism 60, control of the opening/closing operation of the lids 43and 53 of the first cleaning tank 40 and the second cleaning tank 50,control of rotation of the rotating plates 44, 54, control of cleaningand drying, etc.

In the substrate case cleaning apparatus S according to this embodiment,the substrate case C is cleaned in the following way. The control part100 may be programmed in advance to judge if the outside surface of theouter base Mb of the outer pod M has to be cleaned before cleaning thesubstrate case C. Here, first, the case where the outside surface of theouter base Mb has to be cleaned will be explained. First, as shown inFIG. 8A, the substrate case C relating to cleaning is set at the settingtable 13 by another conveyor etc. Before cleaning the substrate case C,as shown in FIG. 8B, the shutter 12 of the booth 10 is opened, theadvance/retraction drive part 33 of the movement mechanism 30 makes thestand 31 advance together with the support table 20 from the initialposition R3 to the advance position R1 and the substrate case C which isplaced on the setting table 13 is received on the support table 20. Atthis time, as shown in FIG. 8C and FIG. 6B, at the advance position R1of the stand 31, the up-down drive part 34 makes the support table 20rise, makes the engagement projections 23 of the support table 20 engagewith the engagement recesses 4 of the outer base Mb of the substratecase C, and lifts up the substrate case C. Further, the outer base Mb isheld by suction by the suction disks 24. For this reason, the substratecase C is prevented from moving to the left or right or front or backand is reliably positioned on the support table 20. Furthermore, thelatch pin 21 a of the latch drive part 21 of the support table 20 isinserted into the insertion hole 2 of the outer base Mb.

Next, as shown in FIG. 8D, the advance/retraction drive part 33 of themovement mechanism 30 makes the stand 31 retract together with thesupport table 20 from the advance position R1 to the retraction positionR2. In this case, since the setting table 13 is formed in a fork shapewhich has an opening part 14, the support table 20 moves through theopening 14 of the setting table 13 while lifting up the substrate case Cand is positioned at the retraction position R2. In this case, thesupport table 20 itself is made to directly move to make the supporttable 20 receive the substrate case C, so compared with the case ofmaking it move by an arm robot like in the past, the substrate case as awhole no longer has to be gripped and transfer of the substrate case Cfrom the setting table 13 to the support table 20 is kept from becomingcomplicated and is simplified. Further, positioning of the substratecase C at the support table 20 also can be facilitated. In particular,it is possible to position and support a substrate case C, which isplaced and positioned at a predetermined position of the setting table13, at a predetermined position on the support table 20 by engagement ofthe engagement recesses 4 and engagement projections 23 and possible toimprove the positioning precision. At this retraction position R2, asshown in FIG. 8E, the latch drive part 21 is driven and unlocked wherebythe parts of the outer base Mb and outer shell Ms of the outer pod M andthe inner base Nb and inner shell Ns of the inner pod N which aresupported at the support table 20 can be detached. Further, the shutter12 is made to close.

In this state, as shown in FIG. 1, the lids 43 and 53 of the firstcleaning tank 40 and the second cleaning tank 50 are opened, theconveyance mechanism 60 is driven, and the support table 20 transfersthe parts of the substrate case C to the conveyance mechanism 60. Theconveyance mechanism 60 conveys the outer shell Ms, inner shell Ns,inner base Nb, and outer base Mb in that order from the support table 20to the insides of the respectively corresponding first cleaning tank 40and the second cleaning tank 50. The holding mechanism 61 grips theparts under the control of the control part 100 by making the holdingmechanism 61 move in the two axial directions of one horizontaldirection (Y-axis direction) and the vertical direction (Z-axisdirection) for positioning and making the gripping hand 70 move in theother horizontal direction (X-axis direction). In this case, the pair ofhand units 71, 71 of the gripping hand 70 can grip all parts. That is,the pair of hand units 71 of the gripping hand 70 are provided with lockparts 73, 74, 75, 76 which lock the outer base Mb and outer shell Ms ofthe outer pod M and the inner base Nb and inner shell Ms oil the innerpod N corresponding to the shapes of the grip parts, so the grip on theparts becomes more reliable. FIG. 7, FIG. 10B, and FIG. 17A show thegripped state of the outer shell Ms, FIG. 11B and FIG. 17B show thegripped state of the outer base Mb, FIG. 12B and FIG. 18A show thegripped state of the inner shell Ns, and FIG. 13B and FIG. 16B show thegripped state of the inner base Nb.

In this case, the outer shell Ms and outer base Mb are received at thefirst cleaning tank 40 in the following way. As shown in FIG. 10A andFIG. 10B, the control part 100 first drives rotation of the firstrotating plate 44 and makes it stop at a predetermined rotation positionso as to support the corner parts of the outer shell Ms by the outershell support rods 47. In this state, the gripping hand 70 which gripsthe outer shell Ms descends inside the first cleaning tank 40, makes theouter shell Ms be supported by the outer shell support rods 47, thenrises. In this case, the outer shell Ms is supported by the lower heightouter shell support rods 47, so becomes positioned together with thegripping hand 70 lower than the higher height outer base support rods46, but the outer base support rods 46 and the outer shell support rods47 are placed at different positions in the rotational direction as eachother, so it is possible to avoid interference with the higher heightouter base support rods 46 and possible to reliably convey, support, andhold the outer shell Ms.

Next, as shown in FIG. 11A, the control part 100 drives rotation of thefirst rotating plate 44 and makes it stop at a predetermined rotationposition so as to enable the corner parts of the outer base Mb to besupported by the outer base support rods 46. That is, the plurality ofouter base support rods 46 and the plurality of outer shell support rods47 are placed at different positions in the rotational direction as eachother, that is, are offset in phase 45° in the rotation direction. Theconveyance mechanism 60 can only make the holding mechanism 61 move inthe two axial directions of one horizontal direction (Y-axis direction)and the vertical direction (Z-axis direction) and cannot change theorientation of the outer base Mb or the orientation of the gripping hand70. However, it is possible to set the stop position of the outer basesupport rods 46 and the stop position of the support rods of the outershell Ms different in phase and adjust the positions of the support rodswith respect to the conveyance mechanism 60, so it is possible toreliably support the outer base Mb at the outer base support rods 46.

On the other hand, the inner shell Ns and inner base Nb are received atthe second cleaning tank 50 in the following way. As shown in FIG. 12Aand FIG. 12B, the control part 100 first drives rotation of the secondrotating plate 54 and makes it stop at a predetermined rotation positionso as to be able to support the corner parts of the inner shell Ns bythe inner shell support rods 57. In this state, the gripping hand 70which grips the inner shell Ns descends inside the second cleaning tank50, makes the inner shell Ns be supported at the inner shell supportrods 57, then rises. In this case, the inner shell Ns is supported atthe lower height inner shell support rods 57, so is positioned togetherthe gripping hand 70 lower than the higher height inner base supportrods 56, but the inner base support rods 56 and the inner shell supportrods 57 are placed at different positions in the rotational direction aseach other, so it is possible to prevent interference with the higherheight inner base support rods 56 and possible to reliably convey,support, and hold the inner shell Ns.

Next, as shown in FIG. 13A, the control part 100 drives rotation of thesecond rotating plate 54 and makes it stop at a predetermined rotationalposition so as to enable the corner parts of the inner base Nb to besupported by the inner base support rods 56. That is, the plurality ofinner base support rods 56 and the plurality of inner shell support rods57 are placed at different positions in the rotational direction as eachother, that is, are offset in phase 45° in the rotation direction. Theconveyance mechanism 60 can make the holding mechanism 61 move in onlythe two axial directions of one horizontal direction (Y-axis direction)and the vertical direction (Z-axis direction) and cannot change theorientation of the inner base Nb or the orientation of the gripping hand70. However, it is possible to make the stopping position of the supportrods 56 of the inner base and the stopping position of the support rodsof the inner shell Ns different in phase and possible to adjust thepositions of the support rods in the conveyance mechanism 60, so theinner base Nb can be reliably supported at the inner base support rods56.

When the conveyance mechanism 60, as shown in FIG. 14A, FIG. 14B, andFIG. 15A and FIG. 15B, finishes conveying the outer shell Ms, innershell Ns, inner base Nb, and outer base Mb in that order from thesupport table 20 to the ins ides of the respectively corresponding firstcleaning tank 40 and the second cleaning tank 50, as shown in FIG. 2,the gripping hand 70 is made to stand by at the standby position Q.Further, as shown in FIG. 1, in the first cleaning tank 40 and thesecond cleaning tank 50, the lids 43, 53 are closed and the parts of theouter pod M and the inner pod N are cleaned. In this case, the outer podM and the inner pod N are cleaned by separate cleaning tanks 40, 50, soit is possible to prevent the contaminant which sticks to the outer podM which is exposed to the outside air from causing secondarycontamination of the inner pod N and therefore possible to improve thecleaning precision.

Further, as shown in FIG. 15A and FIG. 15B, in the first cleaning tank40, the outer base support rods 46 and the outer shell support rods 47support the parts at different predetermined height positions, so in thetank body 42, the outer base Mb and outer shell Ms are exposed at theirouter surfaces and inner surfaces and are held separated from eachother. For this reason, when cleaning, the cleaning solution evenlyreaches the outer base Mb and the outer shell Ms and enables reliablecleaning. On the other hand, as shown in FIG. 14A and FIG. 14B, in thesecond cleaning tank 50 as well, the inner base support rods 56 and theinner shell support rods 57 support the parts at different predeterminedheight positions, so inside the tank body 52, the inner base Nb andinner shell Ns are exposed at their outer surfaces and inner surfacesand are held separated from each other. For this reason, when cleaning,the cleaning solution evenly reaches the inner base Nb and inner shellNs and enables reliable cleaning. That is, when cleaning like in thepast with one part attached to the lids 43, 53, it was hard for thecleaning solution to sufficiently reach the part attached to the lids43, 53, in particular the surface at the lid 43, 53 side, but with theconfiguration of the present invention, the parts can be cleanedseparated inside the tank bodies 42, 52, so it becomes possible to makethe cleaning solution evenly reach the parts and reliably perform thecleaning.

In the cleaning of the parts of the outer pod M and the inner pod N, thegripping hand 70 at the standby position Q is sprayed with gas from thespray nozzle 81 of the cleaning means 80 whereby the gripping hand 70 iscleaned. The gripping hand 70 sometimes is contaminated by transfer ofcontaminant which sticks to the parts due to gripping of the parts, butcan be cleaned by spraying gas from this spray nozzle 81. For thisreason, when the gripping hand 70 grips and conveys the cleaned parts,it is possible to prevent the cleaned parts from ending up beingcontaminated again. Further, the gripping hand 70 is cleaned duringcleaning of the parts, so it is possible to clean it each time cleaningthe parts and possible to reliably prevent contamination of the partsafter cleaning. Further, the spray nozzle 81 sprays gas to removecontaminant which sticks to the gripping hand 70, so it is possible toreliably remove the contaminant. Furthermore, the removed contaminant isexhausted by an exhaust fan 82 to the outside of the booth 10, so it ispossible to hold the booth 10 clean at all times.

When the parts of the outer pod M and the inner pod N finish beingcleaned, in accordance with a process reverse to the above, first thelids 43 and 53 of the first cleaning tank 40 and the second cleaningtank 50 are opened, then the conveyance mechanism 60 is used to conveythe outer base Mb, inner base Nb, inner shell Ms, and outer shell Ms inthat order from the insides of the first cleaning tank 40 and the secondcleaning tank 50 to the support table 20 where they are assembled. Theholding mechanism 61 grips the parts, as explained above, under thecontrol of the control part 100 by making the holding mechanism 61 movein the two axial directions of one horizontal direction (Y-axisdirection) and the vertical direction (Z-axis direction) to position itand making the gripping hand 10 move in the other horizontal direction(X-axis direction). In this case, the pair of hand units 71, 71 of thegripping hand 70 can grip all of the parts. Further, the pair of handunits 71, 71 of the gripping hand 70 are provided with lock parts 73,74, 75, 76 which lock corresponding shapes of the grip parts of theouter base Mb and outer shell Ms of the outer pod M and the inner baseNb and inner shell Ns of the inner pod N, so the grip on the partsbecomes more reliable.

In this case, the outer base Mb and outer shell Ms are taken out fromthe first cleaning tank 40 in the following way. The control part 100first, as shown in FIG. 11A, drives rotation of the first rotating plate44 and makes it stop at a predetermined rotation position so as toenable the outer base Mb to be gripped by the gripping hand 70. In thisstate, the gripping hand 70 descends, grips the outer base Mb, thenrises. Next, the control part 100, as shown in FIG. 10A, drives rotationof the first rotating plate 44 and makes it stop at a predeterminedrotation position so as to enable the outer shell Ms to be gripped bythe gripping hand 70. That is, the plurality of outer base support rods46 and the plurality of outer shell support rods 47 are placed atdifferent positions in the rotational direction as each other, that is,are offset in phase 45° in the rotation direction. In this state, thegripping hand 70 descends, grips the outer shell Ms, then rises. In thiscase, since the outer shell Ms is supported by the lower height outershell support rods 47, it rises together with the gripping hand 70 froma position lower than the higher height outer base support rods 46, butthe outer base support rods 46 and the outer shell support rods 47 areplaced at different positions in the rotational direction as each other,so it is possible to prevent interference with the higher height outerbase support rods 46 and possible to reliably take out the outer shellMs.

On the other hand, the inner base Nb and inner shell Ns are taken outfrom the second cleaning tank 50 in the following way. The control part100 first, as shown in FIG. 13A, drives rotation of the second rotatingplate 54 and makes it stop at a predetermined rotational position so asto grip the inner base Nb by the gripping hand 70. In this state, thegripping hand 70 descends and grips the inner base Nb, then rises. Next,the control part 100, as shown in FIG. 12A, drives rotation of thesecond rotating plate 54 and makes it stop at a predetermined rotationalposition so as to grip the inner shell Ns by the gripping hand 70. Thatis, the plurality of inner base support rods 56 and the plurality ofinner shell support rods 57 are placed at different positions in therotational direction as each other, that is, are offset in phase 45° inthe rotation direction. In this state, the gripping hand 70 descends andgrips the inner shell Ns, then rises. In this case, the inner shell Nsis supported by the lower height inner shell support rods 57 and risestogether with the gripping hand 70 from a lower position than the higherheight inner base support rods 56, but the inner base support rods 56and the inner shell support rods 57 are placed at different positrons inthe rotational direction as each other, so it is possible to avoidinterference with the higher height inner base support rods 56 andpossible to reliably take out the inner shell Ns.

The outer base Mb, inner base Nb, inner shell Ns, and outer shell Mswhich were oaken out in order from the cleaning tanks 40, 50 in this wayare assembled by the reverse process on the support table 20 andsupported as the substrate case C on the support table 20 (see FIG. 8E).In this state, the latch drive part 21 is driven whereby the substratecase C is locked and the parts of the outer base Mb and outer shell Msof the outer pod M and the inner base Nb and inner shell Ns of the innerpod N are rendered undetachable. Further, the shutter 12 of the booth 10is opened, then the advance/retraction drive part 33 of the movementmechanism 30 makes the stand 31 advance together with the support table20 from the retraction position R2 to the advance position R1 andtransfer the substrate case C on the support table 20 to the settingtable 13 (see FIG. 8D and FIG. 8C). In this case, the stand 31 is madeto advance together with the support table 20 to the advance positionR1, but the setting table 13 is formed in a fork shape which has anopening part 14, so the support table 20 moves through the opening ofthe setting table 13 while lifting up the substrate case C and ispositioned at the advance position R1. At this advance position R1, theup-down drive part 34 makes the support table 20 descend and detachesthe engagement projections 23 of the support table 20 from theengagement recesses 4 of the substrate case C to place the substratecase C on the setting table 13 (see FIG. 8B). In this case, the supporttable 20 is directly moved to make the support table 2 receive anddeliver the substrate case C, so compared with she case of making itmove by an arm robot like in the past, the substrate case as a whole nolonger has to be gripped and transfer from the setting table 13 to thesupport table 20 is kept from becoming complicated and is simplified.Further, positioning at the setting table 13 also can be facilitated.Further, the support table 20 retraces to one initial position R3. Inthis state, the substrate case C is conveyed elsewhere from the settingtable 13.

Next, the case where the outside surface of the outer base Mb does notneed to be cleaned will be explained. In this case, the control part 100is programmed in advance with the lack of need of cleaning the outsidesurface of the outer base Mb of the outer pod M. In the same way as theabove, the parts of the outer base Mb and outer shell Ms of the outerpod M and the inner base Nb and inner shell Ms of the inner pod N whichare supported at the support table 20 are conveyed by the conveyancemechanism 60. At this time, as shown in FIG. 1 and FIG. 19, one finalouter base Mb is held at the holding part 90 which is provided at theback surface of the lid 43 of the first cleaning tank 40. In this case,the engagement projections 91 of the holding part 90 are engaged withthe engagement recesses 4 of the outer base Mb and the outer base Mb isheld by suction by the suction disks 92. For this reason, the outer baseMb is kept from moving right or left or front or back and can bereliably held at the holding part 90.

In this state, the lid 43 is closed and the cleaning is performed. Inthis case, the outside surface of the outer base Mb is covered, so theinside surface is reached by the cleaning solution and cleaned, but thecleaning solution is kept from penetrating to the outside surface andtherefore cleaning there is not necessary. For this reason, at theoutside surface of the outer base Mb, there are positioning holes and alock part 1 which locks the assembly of parts etc. If cleaned, thecleaning solution ends up penetrating these and causing the drying totake tremendous time. If allowed to stand in a not dried state, moldwill form at the inside and other detrimental effects will result insome cases, but cleaning is not performed, so these detrimental effectscan be avoided.

Furthermore, in the above embodiment, the case of supporting thesubstrate case C on the support table 20 with the outer base Mb facingdown was shown, but the invention is not necessarily limited to this. Itis also possible to support the support table 20 on the substrate case Cwith the outer shell Ms facing down and convey the outer base Mb, innerbase Nb, inner shell Ns, and outer shell Ms in that order from thesupport table 20 to the insides of the corresponding first cleaning tank40 and second cleaning tank 50 before cleaning the substrate case C andconvey the outer shell Ms, inner shell Ns, inner base Nb, and outer baseMb in that order from the inside of the first cleaning tank 40 and thesecond cleaning tank 50 to the support table 20 for assembly aftercleaning the substrate case C and possible to make other suitablechanges.

REFERENCE SIGNS LIST

S substrate case cleaning apparatus

C substrate case

N inner pod

Nb inner base

Ns inner shell

M outer pod

Mb outer base

Ms outer shell

D substrate

1 lock part

2 insertion hole

3 positioning recess

4 engagement recess

10 booth

11 opening

12 shutter

13 setting table

14 opening part

15 positioning pin

16 positioning block

20 support table

21 latch drive part

23 engagement projection

24 suction disk

30 movement mechanism

31 stand

R1 advance position

R2 retraction position

R3 initial position

32 rail

33 advance/retraction drive part

34 up-down drive part

40 first cleaning tank

41 opening

42 tank body

43 lid

44 first rotating plate

45 first rotation drive part

46 outer base support rod

47 outer shell support rod

48 support member

49 guide pin

50 second cleaning tank

51 opening

52 tank body

53 lid

54 second rotating plate

55 second rotation drive part

56 inner base support rod

57 inner shell support rod

58 support member

59 guide pin

60 conveyance mechanism

61 holding mechanism

62 elevation mechanism

63 running movement mechanism

64 base plate

65 elevator rail

66 stand

67 horizontal rail

70 gripping hand

71 hand unit

72 drive part

73, 74, 75, 76 lock parts

80 cleaning means

Q standby position

81 spray nozzle

82 exhaust fan

90 holding part

91 engagement projection

92 suction disk

100 control part

The invention claimed is:
 1. A substrate case cleaning apparatus whichis configured to clean, in a state with no substrate, a substrate casewhich is provided with an inner pod which comprises an inner base and aninner shell which covers said inner base and holds a substrate inside itand with an outer pod which comprises an outer base which supports saidinner base of said inner pod and an outer shell which covers said outerbase and holds said inner pod inside it, said substrate case cleaningapparatus, comprising: a booth which forms a clean space; a firstcleaning tank which is provided inside said booth and holds and isconfigured to clean parts of the outer base and outer shell of saidouter pod in a separated state; a second cleaning tank which is providedinside said booth and holds and is configured to clean parts of theinner base and inner shell of said inner pod in a separated state; and aconveyance mechanism which is configured to convey the parts of saidouter pod and said inner pod to the corresponding first cleaning tankand second cleaning tank, wherein the substrate case cleaning apparatusis configured to separate the outer base, the outer shell, the innerbase, and the inner shell from each other.
 2. The substrate casecleaning apparatus according to claim 1 further comprising: a supporttable which is provided inside of said booth and supports said substratecase with the outer base or the outer shell facing down in a stateassembled to be able to be separated in the vertical direction, wherein,when said support table supports said substrate case with the outer basefacing down, said conveyance mechanism conveys the outer shell, innershell, inner base, and outer base in that order from said support tableto the insides of the corresponding first cleaning tank and secondcleaning tank before cleaning said substrate case and conveys the outerbase, inner base, inner shell, and outer shell in that order from theinsides of the corresponding first cleaning tank and second cleaningtank to said support table for assembly after cleaning the substratecase, and when the support table supports said substrate case with theouter shell facing down, said conveyance mechanism conveys the outerbase, inner base, inner shell, and outer shell in that order from saidsupport table to the insides of the corresponding first cleaning tankand second cleaning tank before cleaning said substrate case and conveysthe outer shell, inner shell, inner base, and outer base in that orderfrom the insides of the corresponding first cleaning tank and secondcleaning tank to said support table for assembly after cleaning thesubstrate case.
 3. The substrate case cleaning apparatus according toclaim 2 wherein each of said first cleaning tank and said secondcleaning tank has a tank body which has an opening which opens upwardand a lid which can open and close so as to open the opening of saidtank body when parts of said outer pod or inner pod of the substratecase are conveyed and close it when cleaning the parts, wherein saidsupport table, said first cleaning tank, and said second cleaning tankare arranged along one horizontal direction in series, and wherein saidconveyance mechanism has a holding mechanism which can respectively holdthe outer base and outer shell of said outer pod and the inner base andinner shell of said inner pod, an elevation mechanism which makes saidholding mechanism move up and down in the vertical direction, a runningmovement mechanism which makes said holding mechanism move to run in onehorizontal direction, and a control part which controls drive operationsof said holding mechanism, said elevation mechanism, and said runningmovement mechanism.
 4. The substrate case cleaning apparatus accordingto claim 3 wherein said holding mechanism has a gripping hand having apair of hand units which can approach and move apart from each other inanother horizontal direction perpendicular to the one horizontaldirection and a drive part which makes the pair of hand units of saidgripping hand approach and move apart, and wherein said control partcontrols the pair of hand units of the gripping hand to individuallyhold the outer base and outer shell of the outer pod and the inner baseand inner shell of the inner pod.
 5. The substrate case cleaningapparatus according to claim 4 wherein the pair of hand units of saidgripping hand have lock parts which lock respective gripping parts ofthe outer base and outer shell of the outer pod and the inner base andinner shell of the inner pod in accordance with their shapes.